Our Products

PFA-LN

The PFA-LN sensor features Advanced Multi Segment Processing, an innovative technology designed to enhance autofocus performance on complex, patterned, and multilayer samples, such as semiconductor wafer and OLED.

Multi Segment Processing coupled with a new optical design, enhanced processing power and memory, Gigabit Ethernet communication and advanced surface recognition functionality ensures reliable, consistent, high-speed focus for the most demanding applications.

Comparison: Product PFA-LN, ATF6 & ATF6.5

Autofocus Sensor ATF6 ATF6.5 PFA-LN
Structured Light Pattern Line Segment
Wavelengths Available (nm) 660 785 850 680 785 450 660 785 850
Power Output (mW) 0.25 0.021 0.031 1.5 1.6 1.1 1.1 0.9 1.1
Laser Classification I 3B 3B 3B 3B 3R 3R 3R 3R
Maximum Standoff Distance 200mm 300mm 300mm
Communication Differences RS232/RS422 Gigabit Ethernet, RS485
Output Data Rate Up to 1.7kHz (6.5kHz SWIFT Mode) Up to 3 kHz (5kHz SWIFT Mode)
Static Autofocus Repeatability ± 1/3 Objective Depth of Field ± 1/4 Objective Depth of Field
Fast Tracking Autofocus Repeatability ± 1/2 Objective Depth of Field ± 1/3 Objective Depth of Field

Features

  • Up to 3 KHz sample rate and improved processing power enhance high-speed tracking performance offering the fastest autofocus solution available today.
  • Gigabit Ethernet communication provides greater reliability and enhanced capabilities such as diagnostic and performance reporting provides real-time analytic and statistical metrics.
  • NEW 30-degree built into optical design solves problems with rectilinear patterns without external mechanical rotation.
  • Featuring a configurable output supporting both analog output and digital step and direction, making it a universal solution that can interface with Piezo actuators, Dover Motion’s DOF-5, WDI’s new integrated Z stages, and other third-party Z-axis stages.
  • Advanced surface recognition functionality analyzes, differentiates, and permits continuous focus on a specified surface in multi-surface and multilayer samples, providing continuous, accurate results across a variety of applications.
  • Available laser wavelengths include 450nm, 660nm, 785nm, 850nm.

Applications

  • The PFA-LN sensor is the ideal solution for semiconductor, flat panel display, biomedical, and optical metrology microscopy imaging.